Nws yog qhov hloov kho tshiab ntawm EM8000, nrog kev hloov kho E-Beam raj nrawm dua, txawv lub tshuab nqus tsev, muaj los soj ntsuam cov qauv tsis ua ntawm qhov hluav taws xob qis yam tsis muaj sputtering, yooj yim, yooj yim thiab ua haujlwm zoo, ntau qhov kev txhim kho txuas ntxiv. Nws kuj yog thawj FEG SEM uas muaj kev daws teeb meem ntawm 1nm (30kV).
Qhov Zoo:
1, Schittky rab phom tshuab hluav taws xob, lub teeb ci siab, zoo monochromaticity, qhov nqaj me me, lub neej ntev ntev.
2, Nrog E-nqaj raj ua kom tiav, xaiv yeem ua kom qeeb
3, Stable beam tam sim no, qis zog kis
4, Kev coj tus qauv ntsuas tsis muaj sputtering hauv qhov hluav taws xob qis
5, Yooj yim, yooj yim thiab ua haujlwm yooj yim interface
6, Loj 5 axes motorized theem
Kev qhia tshwj xeeb:
Kev teeb tsa | |
Kev daws teeb meem | 1nm@30kV (SE) |
3nm@1Kv (SE) | |
2.5nm@30kV (BSE) | |
Kev nthuav dav | 15x-800,000x |
Ua kom nrawm dua | 0-30kV txuas ntxiv & kho tau |
Electron Phom | Schottky teb emission phom |
Cathode Emitter Cov | Tungsten mono-siv lead ua |
Tsib Qaum Eucentric Pib Theem | X: 0 ~ 150 hli |
Y: 0 ~ 150 hli | |
Z: 0 ~ 60 hli | |
R: 360 ° | |
T: -5 °~75 ° | |
Max Cov Qauv | 320 hli |
L*W*H hli | 342mm*324mm*320mm (sab hauv chav loj) |